The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Sep. 12, 2023

Filed:

Sep. 08, 2017
Applicant:

Luxembourg Institute of Science and Technology (List), Esch-sur-Alzette, LU;

Inventors:

Simon Bulou, Metz, FR;

Patrick Choquet, Longeville les Metz, FR;

Thomas Gaulain, Esch-sur-Alzette, LU;

Mathieu Gerard, Cutry, FR;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01J 37/32 (2006.01); C23C 16/54 (2006.01); C23C 16/452 (2006.01); C23C 16/503 (2006.01); H05H 1/24 (2006.01);
U.S. Cl.
CPC ...
H01J 37/32348 (2013.01); C23C 16/452 (2013.01); C23C 16/503 (2013.01); C23C 16/545 (2013.01); H01J 37/3277 (2013.01); H01J 37/32357 (2013.01); H01J 37/32568 (2013.01); H05H 1/2443 (2021.05);
Abstract

A post-discharge plasma coating device for a wired substrate comprising an inner tubular electrode on an inner tubular wall for receiving the substrate and a precursor moving axially in a working direction; an outer tubular electrode coaxial with, and surrounding, the inner tubular electrode. The inner and outer electrodes are configured to be supplied with an electrical power source for producing a plasma when a plasma gas is supplied between the electrodes and is thereby excited, the plasma excited gas flowing axially in the working direction and reacting with the precursor in a coating area at the end of the inner tubular wall in the direction. The inner tubular wall extends axially towards the coating area at least until, in various instances beyond, the end of the outer electrode, in the working direction and at least one dielectric tubular wall extends axially between the inner tubular electrode and the outer tubular electrode.


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