The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 12, 2023
Filed:
Jun. 26, 2020
Applicant:
Seiko Epson Corporation, Tokyo, JP;
Inventor:
Satoru Tanaka, Chino, JP;
Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01P 15/125 (2006.01); G01P 15/08 (2006.01); G05D 1/02 (2020.01); G01P 15/097 (2006.01);
U.S. Cl.
CPC ...
G05D 1/021 (2013.01); G01P 15/0802 (2013.01); G01P 15/097 (2013.01); G01P 15/125 (2013.01); G01P 2015/0831 (2013.01);
Abstract
An inertial sensor includes, provided that axes X, Y, and Z are three axes perpendicular to one another, a substrate, a fixed section fixed to the substrate, a movable element that swings around a swing axis extending along the axis Y, a first beam and a second beam that link the fixed section to the movable element and are torsionally deformed by the swing motion of the movable element, and a detection electrode that is disposed on the substrate and overlaps with the movable element in the plan view along the axis-Z direction, and the first beam and the second beams differ in shape from each other and have the same torsional spring constant.