The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Sep. 12, 2023

Filed:

Nov. 16, 2020
Applicants:

Shin-etsu Chemical Co., Ltd., Tokyo, JP;

National University Corporation Kanazawa University, Kanazawa, JP;

Inventors:

Hitoshi Noguchi, Takasaki, JP;

Norio Tokuda, Kanazawa, JP;

Tsubasa Matsumoto, Kanazawa, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C30B 29/04 (2006.01); C23C 16/02 (2006.01); C23C 16/27 (2006.01); C30B 25/18 (2006.01); H01F 1/40 (2006.01); C30B 25/20 (2006.01); H01F 10/10 (2006.01); C01B 32/25 (2017.01);
U.S. Cl.
CPC ...
C30B 29/04 (2013.01); C23C 16/0281 (2013.01); C23C 16/277 (2013.01); C23C 16/279 (2013.01); C30B 25/18 (2013.01); C30B 25/183 (2013.01); C30B 25/20 (2013.01); H01F 1/40 (2013.01); C01B 32/25 (2017.08); H01F 10/10 (2013.01); Y10T 428/30 (2015.01);
Abstract

A method for manufacturing diamond substrate of using source gas containing hydrocarbon gas and hydrogen gas to form diamond crystal on an underlying substrate by CVD method, to form a diamond crystal layer having nitrogen-vacancy centers in at least part of the diamond crystal, nitrogen or nitride gas is mixed in the source gas, wherein the source gas is: 0.005 volume % or more and 6.000 volume % or less of the hydrocarbon gas; 93.500 volume % or more and less than 99.995 volume % of the hydrogen gas; and 5.0×10volume % or more and 5.0×10volume % or less of the nitrogen gas or the nitride gas, and the diamond crystal layer having the nitrogen-vacancy centers is formed. A method for manufacturing a diamond substrate to form an underlying substrate, a diamond crystal having a dense nitrogen-vacancy centers (NVCs) with an orientation of NV axis by performing the CVD.


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