The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 12, 2023
Filed:
Dec. 09, 2020
Applicant:
Research & Business Foundation Sungkyunkwan University, Suwon-si, KR;
Inventors:
Changgu Lee, Seoul, KR;
Hyonggoo Yoo, Seoul, KR;
Assignee:
Research & Business Foundation Sungkyunkwan University, Suwon-si, KR;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 18/14 (2006.01); C23C 18/12 (2006.01); C23C 18/06 (2006.01); C23C 18/04 (2006.01);
U.S. Cl.
CPC ...
C23C 18/143 (2019.05); C23C 18/04 (2013.01); C23C 18/06 (2013.01); C23C 18/1204 (2013.01); C23C 18/125 (2013.01); C23C 18/1245 (2013.01);
Abstract
A method of manufacturing transition metal chalcogenide thin films, includes the operations of forming a transition metal chalcogenides precursor on a substrate, and irradiating light onto the transition metal chalcogenides precursor. The transition metal chalcogenides precursor includes an amine-based ligand.