Cobalt complex, method for manufacturing same, and method for manufacturing cobalt-containing thin film

Abstract

To provide a cobalt complex which is liquid at room temperature, useful for producing a cobalt-containing thin film under conditions without using an oxidizing gas. A cobalt complex represented by the following formula (1): wherein Land Lrepresent a unidentate amide ligand of the following formula (A), a bidentate amide ligand of the following formula (B) or a hetero atom-containing ligand of the following formula (C): wherein Rand Rrepresent a Calkyl group or a tri(Calkyl)silyl group, and the wave line represents a binding site to the cobalt atom; wherein Rrepresents a tri(Calkyl)silyl group, Rand Rrepresent a Calkyl group, and X represents a Calkylene group; wherein Rand Rrepresent a Calkyl group, Rrepresents a hydrogen atom or a Calkyl group, Y represents an oxygen atom or NR, Z represents an oxygen atom or NR, and Rand Rindependently represent a Calkyl group.