The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 12, 2023
Filed:
Nov. 08, 2019
Tosoh Corporation, Shunan, JP;
Sagami Chemical Research Institute, Ayase, JP;
Hiroyuki Oike, Ayase, JP;
Teppei Hayakawa, Ayase, JP;
Yuki Yamamoto, Ayase, JP;
Taishi Furukawa, Ayase, JP;
Ken-ichi Tada, Ayase, JP;
TOSOH CORPORATION, Yamaguchi, JP;
SAGAMI CHEMICAL RESEARCH INSTITUTE, Kanagawa, JP;
Abstract
To provide a cobalt complex which is liquid at room temperature, useful for producing a cobalt-containing thin film under conditions without using an oxidizing gas. A cobalt complex represented by the following formula (1): wherein Land Lrepresent a unidentate amide ligand of the following formula (A), a bidentate amide ligand of the following formula (B) or a hetero atom-containing ligand of the following formula (C): wherein Rand Rrepresent a Calkyl group or a tri(Calkyl)silyl group, and the wave line represents a binding site to the cobalt atom; wherein Rrepresents a tri(Calkyl)silyl group, Rand Rrepresent a Calkyl group, and X represents a Calkylene group; wherein Rand Rrepresent a Calkyl group, Rrepresents a hydrogen atom or a Calkyl group, Y represents an oxygen atom or NR, Z represents an oxygen atom or NR, and Rand Rindependently represent a Calkyl group.