The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 05, 2023
Filed:
Jun. 04, 2020
Nissin Ion Equipment Co., Ltd., Koka, JP;
Himeji Rika Co., Ltd., Hyogo Prefecture, JP;
Masatoshi Onoda, Shiga, JP;
Ryosuke Goto, Shiga, JP;
Kazuo Shimizu, Hyogo, JP;
Yasuhiro Kishimoto, Hyogo, JP;
NISSIN ION EQUIPMENT CO., LTD., Koka, JP;
HIMEJI RIKA CO., LTD., Himeji, JP;
Abstract
A substrate heating device is provided. The substrate heating device includes a vacuum chamber and a heater. The vacuum chamber receives a substrate. The heater includes a body, a heating wire, and a terminal part. The body penetrates through a wall of the vacuum chamber such that a portion of the body is in a vacuum atmosphere of the vacuum chamber. The heating wire is provided inside the body and partly disposed inside the vacuum chamber. The terminal part is connected to the heating wire and is disposed outside the vacuum chamber.