The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Sep. 05, 2023

Filed:

Nov. 06, 2020
Applicant:

Kabushiki Kaisha Yaskawa Denki, Fukuoka, JP;

Inventors:

Masanobu Harada, Fukuoka, JP;

Hiromitsu Akae, Fukuoka, JP;

Norihisa Iwasaki, Fukuoka, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B25J 19/02 (2006.01); H01L 21/687 (2006.01); H01L 21/67 (2006.01); B65G 47/90 (2006.01); H02K 7/08 (2006.01); H02K 11/215 (2016.01); H02K 5/173 (2006.01);
U.S. Cl.
CPC ...
H01L 21/68707 (2013.01); B25J 19/027 (2013.01); B65G 47/90 (2013.01); H01L 21/67167 (2013.01); H02K 5/1737 (2013.01); H02K 7/088 (2013.01); H02K 11/215 (2016.01);
Abstract

A first vacuum motor includes a first pivoting shaft member, a bearing that rotatably supports the first pivoting shaft member, a disk disposed to be rotatable together with the first pivoting shaft member and having slits, a first bracket that is made of a non-magnetic material and supports the bearing, a recess formed in the first bracket to be dented in the axial direction, and a sensor unit disposed to face the disk in the axial direction via a thin wall formed by the recess. By the thin wall, the space where the sensor unit is disposed under the atmospheric pressure is isolated from the space where the disk is disposed under a reduced pressure lower than the atmospheric pressure.


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