The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Sep. 05, 2023

Filed:

Feb. 08, 2021
Applicant:

Core Flow Ltd., Daliyat el-Karmel, IL;

Inventors:

Boaz Nishri, Kibbutz Maagan Michael, IL;

Ami Herman, Shimshit, IL;

Nir Gurarye, Kfar Tavor, IL;

Yaacov Legerbaum, Haifa, IL;

Igor Birger, Haifa, IL;

Alon Segal, Kiriyat Tivon, IL;

Mart Genender, Lod, IL;

Ronen Lautman, Haifa, IL;

Assignee:

Core Flow Ltd., Daliyat el-Karmel, IL;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/683 (2006.01); B23B 31/30 (2006.01); F25B 9/14 (2006.01);
U.S. Cl.
CPC ...
H01L 21/6838 (2013.01); B23B 31/307 (2013.01); F25B 9/14 (2013.01);
Abstract

A chuck includes a chuck surface, a plurality of vacuum ports being distributed over the chuck surface. Each of the vacuum ports is open to a conduit that is connectable to a suction source that is operable to apply suction to that vacuum port. A flow restrictor is located within each conduit and is characterized by a flow resistance. The flow resistance of the flow restrictor in at least one conduit is less than the flow resistance of the flow restrictor in at least one other conduit.


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