The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Sep. 05, 2023

Filed:

Dec. 03, 2019
Applicant:

Hitachi High-tech Corporation, Tokyo, JP;

Inventors:

Yutaka Okuyama, Tokyo, JP;

Takeshi Ohmori, Tokyo, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G05B 13/04 (2006.01); H05H 1/24 (2006.01);
U.S. Cl.
CPC ...
G05B 13/048 (2013.01); G05B 13/042 (2013.01); H05H 1/24 (2013.01);
Abstract

A parameter compression unit compresses first input parameter values so that a parameter restoration unit can restore the first input parameter values, and generates first compressed input parameter values in which the number of control parameters is reduced, a model learning unit learns a prediction model from learning data that is a set of the first compressed input parameter values and first output parameter values that are processing results obtained by giving the first input parameter values, as a plurality of control parameters, to a processing device, and a processing condition search unit estimates a second compressed input parameter values corresponding to target output parameter values by using the prediction model.


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Okuyama, Yutaka. (2023). Search device, search program, and plasma processing apparatus (U.S. Patent No. 11747774). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/11747774

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