The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 05, 2023
Filed:
Dec. 04, 2020
Beijing Voyager Technology Co., Ltd., Beijing, CN;
Sergio Fabian Almeida Loya, Mountain View, CA (US);
Youmin Wang, Mountain View, CA (US);
Beijing Voyager Technology Co., Ltd., Beijing, CN;
Abstract
In one example, a semiconductor integrated circuit is provided. The semiconductor integrated circuit includes a microelectromechanical system (MEMS), a substrate on which the MEMS is formed, and a controller, the MEMS including one or more micro-mirror assemblies, each micro-mirror assembly including: a micro-mirror comprising a first connection structure and a second connection structure, the first connection structure being connected to the substrate at a first pivot point, the second connection structure being connected to the substrate at a second pivot point; an actuator configured to rotate the micro-mirror; and a measurement circuit configured to measure an electrical resistance of at least one of the first connection structure or the second connection structure. The controller is configured to control the actuator of each of the one or more micro-mirror assemblies based on the electrical resistance measurements from the measurement circuits.