The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 05, 2023
Filed:
Nov. 05, 2019
Applicant:
Moxtek, Inc., Orem, UT (US);
Inventors:
Matthew R. Linford, Orem, UT (US);
Brian Johnson, Santaquin, UT (US);
Anubhav Diwan, Provo, UT (US);
Assignee:
Moxtek, Inc., Orem, UT (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
C23C 16/455 (2006.01); C23C 16/40 (2006.01); C23C 16/48 (2006.01); C23C 16/56 (2006.01); G02B 5/30 (2006.01); C23C 16/50 (2006.01); C23C 16/448 (2006.01); C23C 16/02 (2006.01);
U.S. Cl.
CPC ...
C23C 16/45548 (2013.01); C23C 16/02 (2013.01); C23C 16/402 (2013.01); C23C 16/4485 (2013.01); C23C 16/48 (2013.01); C23C 16/50 (2013.01); C23C 16/56 (2013.01); G02B 5/3025 (2013.01);
Abstract
Thick, inorganic coatings can be deposited on a polarizer by chemical vapor deposition. In one embodiment, the method can comprise activating a surface of the polarizer with an oxygen plasma in an oven; injecting a solution including tetrakis(dimethylamino)silane dissolved in cyclohexane and water into the oven; and vapor depositing silicon dioxide onto the polarizer. These three steps can be repeated multiple times until desired thickness is attained.