The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 05, 2023
Filed:
Feb. 25, 2018
Applicants:
Alex P. G. Robinson, Northfield Birmingham, GB;
Guy Dawson, Bishops Tachbrook, GB;
Alan G. Brown, Malvern, GB;
Thomas Lada, Somerville, MA (US);
John Roth, Cohasset, MA (US);
Edward Jackson, Franklin, MA (US);
Inventors:
Alex P. G. Robinson, Northfield Birmingham, GB;
Guy Dawson, Bishops Tachbrook, GB;
Alan G. Brown, Malvern, GB;
Thomas Lada, Somerville, MA (US);
John Roth, Cohasset, MA (US);
Edward Jackson, Franklin, MA (US);
Assignee:
IRRESISTIBLE MATERIALS LTD, Birmingham, GB;
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/033 (2006.01); C08G 59/50 (2006.01); C09D 163/04 (2006.01);
U.S. Cl.
CPC ...
C09D 163/04 (2013.01); C08G 59/5033 (2013.01); H01L 21/0332 (2013.01);
Abstract
Disclosed and claimed herein is a composition for forming a spin-on hard-mask, having a fullerene derivative substituted with an amine and a crosslinking agent. The formulation is drain compatible with other solvents used in the semiconductor industry.