The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 05, 2023
Filed:
Oct. 16, 2020
Applicant:
Samsung Electronics Co., Ltd., Suwon-si, KR;
Inventors:
Gyuhee Park, Hwaseong-si, KR;
Younjoung Cho, Hwaseong-si, KR;
Haruyoshi Sato, Tokyo, JP;
Kazuki Harano, Tokyo, JP;
Hiroyuki Uchiuzou, Tokyo, JP;
Assignees:
SAMSUNG ELECTRONICS CO., LTD., Suwon-si, KR;
ADEKA CORPORATION, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 16/40 (2006.01); C07F 11/00 (2006.01); C01G 39/02 (2006.01); C23C 16/34 (2006.01); C01B 21/06 (2006.01);
U.S. Cl.
CPC ...
C07F 11/00 (2013.01); C01B 21/062 (2013.01); C01G 39/02 (2013.01); C23C 16/34 (2013.01); C23C 16/405 (2013.01);
Abstract
A molybdenum compound and a method of manufacturing an integrated circuit device, the molybdenum compound being represented by the following General Formula (I):