The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Sep. 05, 2023

Filed:

Jul. 10, 2017
Applicant:

Noritake Co., Limited, Nagoya, JP;

Inventors:

Wataru Omori, Nagoya, JP;

Takaya Yamaguchi, Nagoya, JP;

Shota Kitajima, Nagoya, JP;

Makoto Sato, Nagoya, JP;

Assignee:

NORITAKE CO., LIMITED, Nagoya, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B24B 37/26 (2012.01); H01L 21/321 (2006.01); B24D 3/00 (2006.01); B24D 11/00 (2006.01); B24D 3/32 (2006.01); B24B 37/24 (2012.01); H01L 21/304 (2006.01);
U.S. Cl.
CPC ...
B24B 37/26 (2013.01); B24B 37/24 (2013.01); B24D 3/00 (2013.01); B24D 3/32 (2013.01); B24D 11/00 (2013.01); H01L 21/304 (2013.01); H01L 21/3212 (2013.01);
Abstract

In an abrasive body used for polishing by a CMP method, provided with a resin structure, a plurality of abrasive grains, and a plurality of longitudinal pores, and made in a form of disc, the longitudinal pore has a length in a thickness direction of the abrasive body longer than a length in a planar direction of the abrasive body, the resin structure includes communicating pores each of which communicating with the longitudinal pore and/or communicating with other communicating pore, the communicating pores include at least one of the abrasive grains in the pores respectively, and the average diameter of the communicating pores is not more than 18 times larger than the average diameter of the abrasive grains.


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