The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 29, 2023
Filed:
Feb. 15, 2022
Rohm Co., Ltd., Kyoto, JP;
ROHM CO., LTD., Kyoto, JP;
Abstract
A piezoelectric elementincludes a lower electrode, constituted of a Pt/Ti laminated film, a PLT seed layer, formed on the lower electrode, a PZT piezoelectric film, formed on the PLT seed layer, and an upper electrode, formed on the PZT piezoelectric film. A curve Qis a curve drawn such as to pass through a plurality of plotted points, each expressing a PLT () peak intensity with respect to a Pt () peak intensity according to a substrate setting temperature during forming of the Pt/Ti laminated film. A relationship of the PLT () peak intensity with respect to the Pt () peak intensity is within a range in the curve Quntil the PLT () peak intensity decreases by 5% from a peak point P, at which the PLT () peak intensity is the maximum, and a () orientation rate of PLT constituting the seed layer is not less than 85%.