The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 29, 2023
Filed:
Jul. 02, 2020
Applicant:
Boe Technology Group Co., Ltd., Beijing, CN;
Inventors:
Zhiwei Liang, Beijing, CN;
Wenqian Luo, Beijing, CN;
Yingwei Liu, Beijing, CN;
Ke Wang, Beijing, CN;
Shengguang Ban, Beijing, CN;
Zhanfeng Cao, Beijing, CN;
Assignee:
BOE Technology Group Co., Ltd., Beijing, CN;
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 33/62 (2010.01); H01L 23/00 (2006.01);
U.S. Cl.
CPC ...
H01L 33/62 (2013.01); H01L 24/16 (2013.01); H01L 2224/16225 (2013.01); H01L 2933/0066 (2013.01);
Abstract
A preparation method of a backplane includes: forming an insulating structure layer having a groove on a base substrate by a mask exposure process, the groove being used for accommodating a metal trace; and repeating a metal sub-layer forming step including an ashing process and a wet etching process multiple times to form the metal trace positioned in the groove.