The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 29, 2023
Filed:
Jun. 22, 2021
Nikon Corporation, Tokyo, JP;
Yuichi Shibazaki, Kumagaya, JP;
NIKON CORPORATION, Tokyo, JP;
Abstract
A determination apparatus has a calculation section, where first and second direction pitches intersecting within a predetermined plane of a plurality of detection areas are Dand D, respectively, sizes in the first and second directions of each of a plurality of divided areas arranged two-dimensionally along the first and second directions on a substrate are Wand W, respectively, and first and second direction pitches of a plurality of marks arranged on the substrate are pand p, respectively, calculates pitch pand pitch pof the plurality of marks that satisfy formulas (a) and (b) below, based on pitch D, pitch D, size W, and size W.(denotes a natural number)=(denotes a natural number)  (a)(denotes a natural number)=(denotes a natural number)  (b)