The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 29, 2023
Filed:
Jul. 02, 2020
Applicant:
Excillum Ab, Kista, SE;
Inventor:
Björn Hansson, Kista, SE;
Assignee:
EXCILLUM AB, Kista, SE;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J 35/30 (2006.01); H01J 35/14 (2006.01); G01N 23/04 (2018.01); H05G 1/52 (2006.01);
U.S. Cl.
CPC ...
H01J 35/30 (2013.01); G01N 23/04 (2013.01); H01J 35/153 (2019.05); H05G 1/52 (2013.01); G01N 2223/1016 (2013.01); G01N 2223/204 (2013.01); G01N 2223/3301 (2013.01); G01N 2223/3307 (2013.01);
Abstract
A method for imaging a sample by means of an X-ray detector is disclosed, including providing an electron beam interacting with a target to generate X-ray radiation emitted from an X-ray spot on the target, moving the sample relative to the target, deflecting the electron beam such that the X-ray spot is moved over the target simultaneously and in accordance with the movement of the sample, and detecting X-ray radiation emitted from the X-ray spot and interacting with the sample.