The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Aug. 29, 2023

Filed:

Nov. 13, 2018
Applicant:

Nederlandse Organisatie Voor Toegepast-natuurwetenschappelijk Onderzoek Tno, s-Gravenhage, NL;

Inventor:

Gerwin Hermanus Gelinck, Valkenswaard, NL;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01J 5/20 (2006.01); H01L 23/467 (2006.01); G01J 5/02 (2022.01); G01J 5/04 (2006.01); G01J 5/061 (2022.01); G01J 5/05 (2022.01);
U.S. Cl.
CPC ...
G01J 5/20 (2013.01); G01J 5/0215 (2013.01); G01J 5/0225 (2013.01); G01J 5/046 (2013.01); G01J 5/051 (2022.01); G01J 5/061 (2013.01); G01J 2005/202 (2013.01); H01L 23/467 (2013.01);
Abstract

A microbolometer for measuring thermal radiation comprises an electrical circuit on a perforated plastic substrate. The electrical circuit comprises at least one thermistor having a temperature dependent electric resistance, wherein the thermistor is arranged to receive the thermal radiation for changing its temperature depending on a flux of the received thermal radiation. The electrical circuit is configured to measure the electric resistance of the thermistor for calculating the thermal radiation. The microbolometer is configured to cause a gas flow through the perforations for improving thermal characteristics.


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