The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 29, 2023
Filed:
May. 27, 2021
Applicant:
Murata Manufacturing Co., Ltd., Nagaokakyo, JP;
Inventor:
Yutaka Kishimoto, Nagaokakyo, JP;
Assignee:
MURATA MANUFACTURING CO., LTD., Nagaokakyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B81B 1/00 (2006.01); B81C 1/00 (2006.01);
U.S. Cl.
CPC ...
B81B 1/002 (2013.01); B81C 1/00047 (2013.01); B81B 2203/0315 (2013.01); B81C 2201/0132 (2013.01); B81C 2203/036 (2013.01);
Abstract
A silicon substrate having a first silicon substrate having a first surface with a cavity and a second surface opposite the first surface; a first silicon oxide film having a thickness d1 on the first surface; a second silicon oxide film having a thickness d2 on a bottom of the cavity; and a third silicon oxide film having a thickness d3 on the second surface, where d1≤d3 and d1<d2, or d3<d1 and d2<d1.