The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Aug. 22, 2023

Filed:

Sep. 10, 2019
Applicant:

Samsung Display Co., Ltd., Yongin-si, KR;

Inventors:

Heungyeol Na, Suwon-si, KR;

Mingyoun Kang, Siheung-si, KR;

Dongwon Seol, Asan-si, KR;

Assignee:

SAMSUNG DISPLAY CO., LTD., Gyeonggi-Do, KR;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 21/67 (2006.01); H01L 21/677 (2006.01); H01L 21/68 (2006.01); H01L 21/687 (2006.01); B25J 19/02 (2006.01); G06T 7/70 (2017.01); B25J 9/16 (2006.01);
U.S. Cl.
CPC ...
H01L 21/67736 (2013.01); B25J 9/1697 (2013.01); B25J 19/023 (2013.01); G06T 7/70 (2017.01); H01L 21/67706 (2013.01); H01L 21/67766 (2013.01); H01L 21/681 (2013.01); H01L 21/687 (2013.01); Y10T 29/49004 (2015.01); Y10T 29/53261 (2015.01);
Abstract

A system for transferring a substrate includes a substrate transporter at which is captured a first image with which a position of the substrate at the substrate transporter is determined; a tray at which is captured a second image with which a position of each of a plurality of substrates relative to the tray is determined; a substrate mover with which the substrate is movable in a revolving manner between the substrate transporter and the tray, the substrate mover including: an arm portion movable in the revolving manner between the substrate transporter and the tray, and a substrate securing portion movable together with the arm portion; and an imager with which the first image and the second image are captured, the imager connected to the arm portion and movable in the revolving manner between the substrate transporter and the tray together with the arm portion.


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