The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 22, 2023
Filed:
Oct. 20, 2020
Applied Materials, Inc., Santa Clara, CA (US);
Kartik Santhanam, Sunnyvale, CA (US);
Kartik Shah, Saratoga, CA (US);
Wolfgang Aderhold, Santa Clara, CA (US);
Martin Hilkene, Gilroy, CA (US);
Stephen Moffatt, St. Brelade, JE;
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
Embodiments disclosed herein include a processing tool for semiconductor processing. In an embodiment, the processing tool comprises a chamber, and a plurality of witness sensors integrated with the chamber. In an embodiment, the processing tool further comprises a drift detection module. In an embodiment, data from the plurality of witness sensors is provided to the drift detection module as input data. In an embodiment, the processing tool further comprises a dashboard for displaying output data from the drift detection module.