The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Aug. 22, 2023

Filed:

Sep. 03, 2021
Applicant:

Applied Materials, Inc., Santa Clara, CA (US);

Inventors:

Chuang-Chia Lin, San Ramon, CA (US);

Upendra Ummethala, Cupertino, CA (US);

Steven E. Babayan, Los Altos, CA (US);

Lei Lian, Fremont, CA (US);

Assignee:

Applied Materials, Inc., Santa Clara, CA (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01J 3/443 (2006.01); G01J 3/02 (2006.01); H01J 37/32 (2006.01); H01J 37/22 (2006.01);
U.S. Cl.
CPC ...
H01J 37/32917 (2013.01); G01J 3/0218 (2013.01); G01J 3/443 (2013.01); H01J 37/22 (2013.01); H01J 2237/24585 (2013.01);
Abstract

Embodiments disclosed herein include optical sensor systems and methods of using such systems. In an embodiment, the optical sensor system comprises a housing and an optical path through the housing. In an embodiment, the optical path comprises a first end and a second end. In an embodiment a reflector is at the first end of the optical path, and a lens is between the reflector and the second end of the optical path. In an embodiment, the optical sensor further comprises an opening through the housing between the lens and the reflector.


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