The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Aug. 22, 2023

Filed:

Jul. 01, 2021
Applicant:

Seiko Epson Corporation, Tokyo, JP;

Inventors:

Kenta Sato, Shiojiri, JP;

Masayoshi Todorokihara, Suwa, JP;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01P 15/097 (2006.01); G01C 9/02 (2006.01); H03M 3/00 (2006.01); G01P 15/08 (2006.01);
U.S. Cl.
CPC ...
G01P 15/097 (2013.01); G01C 9/02 (2013.01); G01P 15/0802 (2013.01); H03M 3/378 (2013.01);
Abstract

A physical quantity sensor module includes: a resonant frequency shift based physical quantity sensor whose frequency adjusts with a adjust in physical quantity; a reference signal oscillator which outputs a reference signal; a frequency delta-sigma modulator which performs frequency delta-sigma modulation of the reference signal, using an operation signal based on a measurement target signal as an output from the resonant frequency shift based physical quantity sensor, and generates a frequency delta-sigma modulated signal; a first low-pass filter provided on an output side of the frequency delta-sigma modulator and operating synchronously with the measurement target signal as the output from the resonant frequency shift based physical quantity sensor; and a second low-pass filter provided on an output side of the first low-pass filter and operating synchronously with the reference signal.


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