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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 11732359 B1

PDFFull Text
Date of Patent:
Aug. 22, 2023

Filed:

Feb. 08, 2018

Wafer holder

Applicant:

Sumitomo Electric Industries, Ltd., Osaka, JP;

Inventors:

Koichi Kimura, Itami, JP;

Akira Mikumo, Itami, JP;

Shigenobu Sakita, Itami, JP;

Daisuke Shimao, Itami, JP;

Assignee:

Sumitomo Electric Industries, Ltd., Osaka, JP;

Attorneys:

McCarter & English, LLP

Michael A. Sartori

Primary Examiner:

Ram N Kackar

Assistant Examiner:

Laureen Chan

Int. Cl.
CPC ...
C23C 16/458 (2006.01); C23C 14/50 (2006.01); H01L 21/683 (2006.01); H05B 3/03 (2006.01); H01L 21/02 (2006.01); H01J 37/32 (2006.01);
U.S. Cl.
CPC ...
C23C 16/458 (2013.01); C23C 14/50 (2013.01); C23C 16/4586 (2013.01); H01J 37/32715 (2013.01); H01J 37/32724 (2013.01); H01L 21/02274 (2013.01); H01L 21/6831 (2013.01); H05B 3/03 (2013.01);
Abstract

A wafer holder comprising: a ceramic base having a wafer-mounting surface as an upper surface; and a conductive member embedded in the ceramic base, the conductive member including a circuit portion provided parallel to the wafer-mounting surface, a pull-out portion provided parallel to the wafer-mounting surface and spaced from the circuit portion in a direction opposite to a direction toward the wafer-mounting surface, and a connecting portion configured to electrically connect the circuit portion and the pull-out portion to each other.

Find Patent Forward Citations

Kimura, Koichi. (2023). Wafer holder (U.S. Patent No. 11732359). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/11732359

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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