The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 22, 2023
Filed:
Aug. 17, 2022
Applicant:
Applied Materials, Inc., Santa Clara, CA (US);
Inventors:
Muhannad Mustafa, Milpitas, CA (US);
Muhammad M. Rasheed, San Jose, CA (US);
Mario D. Sanchez, San Jose, CA (US);
Srinivas Gandikota, Santa Clara, CA (US);
Wei V. Tang, Santa Clara, CA (US);
Assignee:
APPLIED MATERIALS, INC., Santa Clara, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 16/40 (2006.01); C23C 16/455 (2006.01); C23C 16/52 (2006.01); C23C 16/50 (2006.01);
U.S. Cl.
CPC ...
C23C 16/45565 (2013.01); C23C 16/455 (2013.01); C23C 16/45536 (2013.01); C23C 16/50 (2013.01); C23C 16/52 (2013.01);
Abstract
Process chamber lids, processing chambers and methods using the lids are described. The lid includes a pumping liner with a showerhead, blocker plate and gas funnel positioned therein. A liner heater is positioned on the pumping liner to control temperature in the pumping liner. Gas is flowed into the gas funnel using a dead-volume free one-way valve with a remote plasma source.