The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 15, 2023
Filed:
Jul. 15, 2021
Samsung Electronics Co., Ltd., Suwon-si, KR;
Younsoo Kim, Yongin-si, KR;
Haeryong Kim, Seongnam-si, KR;
Seungmin Ryu, Hwaseong-si, KR;
Sunmin Moon, Yongin-si, KR;
Jeonggyu Song, Seongnam-si, KR;
Changsu Woo, Seoul, KR;
Kyooho Jung, Seoul, KR;
Younjoung Cho, Hwaseong-si, KR;
Samsung Electronics Co., Ltd., Gyeonggi-do, KR;
Abstract
A method of forming an oxide film including two non-oxygen elements includes providing a first source material on a substrate, the first source material including a first central element, providing an electron donor compound to be bonded to the first source material, providing a second source material on the substrate after the providing of the electron donor compound, the second source material including a second central element, and providing an oxidant on the substrate.