The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 15, 2023
Filed:
May. 26, 2022
Applicant:
Integrated Dynamic Electron Solutions, Inc., Pleasanton, CA (US);
Inventors:
Ruth Shewmon Bloom, Oakland, CA (US);
Bryan Walter Reed, San Leandro, CA (US);
Daniel Joseph Masiel, Alamo, CA (US);
Sang Tae Park, Danville, CA (US);
Assignee:
INTEGRATED DYNAMIC ELECTRON SOLUTIONS, INC., Pleasanton, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J 37/24 (2006.01); H01J 37/29 (2006.01); H01J 37/28 (2006.01); H01J 37/147 (2006.01);
U.S. Cl.
CPC ...
H01J 37/243 (2013.01); H01J 37/147 (2013.01); H01J 37/28 (2013.01); H01J 37/292 (2013.01);
Abstract
A device may include an electron source, a detector, and a deflector. The electron source may be directed toward a sample area. The detector may receive an electron signal or an electron-induced signal. A deflector may be positioned between the electron source and the sample. The deflector may modulate an intensity of the electron source directed to the sample area according to an electron dose waveform having a continuously variable temporal profile.