The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 15, 2023
Filed:
Oct. 02, 2020
Canon Kabushiki Kaisha, Tokyo, JP;
Toshiyuki Sato, Utsunomiya, JP;
Sentaro Aihara, Utsunomiya, JP;
CANON KABUSHIKI KAISHA, Tokyo, JP;
Abstract
In order to provide an information processing apparatus in which a correction work time for coating information is shortened, an information processing apparatus for an imprint apparatus configured to perform an imprint process of forming a pattern on an imprint material (R) on a substrate (W) using a mold on the basis of coating information indicating a position of the imprint material (R) includes: at least one processor or circuit which function as: an obtaining unit configured to obtain inspection information regarding a result of an inspection of the substrate (W) which has been subjected to the imprint process; an analysis unit configured to analyze the inspection information and obtain analysis information associated with the result of the imprint process; and a display control unit configured to display at least any of the inspection information and the analysis information on a screen of a display apparatus at the same time with the coating information.