The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 15, 2023
Filed:
Oct. 19, 2019
Beijing Voyager Technology Co., Ltd., Beijing, CN;
Youmin Wang, Mountain View, CA (US);
Yufeng Wang, Mountain View, CA (US);
Qin Zhou, Mountain View, CA (US);
BEIJING VOYAGER TECHNOLOGY CO., LTD., Beijing, CN;
Abstract
Embodiments of the disclosure provide a micromachined mirror assembly for controlling optical directions in an optical sensing system. The micromachined mirror assembly includes a micro mirror and at least one piezoelectric actuator. The micro mirror is suspended over a substrate by at least one beam mechanically coupled to the micro mirror, and the at least one piezoelectric actuator is mechanically coupled to the at least one beam and is configured to drive the micro mirror via the at least one beam. The at least one piezoelectric actuator is configured to drive the micro mirror to tilt along a first axis based on a first electrical signal received by the at least one piezoelectric actuator.