The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Aug. 15, 2023

Filed:

Jun. 20, 2022
Applicant:

Raytheon Technologies Corporation, Farmington, CT (US);

Inventors:

Brian T. Hazel, Avon, CT (US);

Michael J. Maloney, Marlborough, CT (US);

James W. Neal, Jupiter, FL (US);

David A. Litton, West Hartford, CT (US);

Assignee:

Raytheon Technologies Corporation, Farmington, CT (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 14/30 (2006.01); C23C 14/24 (2006.01); C23C 14/22 (2006.01); C23C 14/50 (2006.01);
U.S. Cl.
CPC ...
C23C 14/30 (2013.01); C23C 14/228 (2013.01); C23C 14/243 (2013.01); C23C 14/246 (2013.01); C23C 14/505 (2013.01);
Abstract

A deposition apparatus () comprising: a chamber (); a process gas source () coupled to the chamber; a vacuum pump () coupled to the chamber; at least two electron guns (); one or more power supplies () coupled to the electron guns; a plurality of crucibles () positioned or positionable in an operative position within a field of view of at least one said electron gun; and a part holder () having at least one operative position for holding parts spaced above the crucibles by a standoff height H. The standoff height H is adjustable in a range including at least 22 inches.


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