The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 15, 2023
Filed:
Jun. 20, 2019
Applicant:
Hs Hi-tech Co., Ltd., Hwaseong, KR;
Inventors:
Beom Jin Kim, Hwaseong, KR;
Hyun Sin Kim, Cheonan, KR;
Assignee:
HS HI-TECH CO., LTD., Gyeonggi-do, KR;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B05B 1/18 (2006.01); B08B 3/02 (2006.01); H01L 21/67 (2006.01); B29C 65/08 (2006.01);
U.S. Cl.
CPC ...
B05B 1/185 (2013.01); B08B 3/02 (2013.01); H01L 21/67051 (2013.01); B29C 65/08 (2013.01);
Abstract
The present invention relates to a nozzle for cleaning a substrate by discharging cleaning liquid to the substrate and a method of manufacturing the nozzle and, more particularly, to a nozzle for cleaning a substrate and a method of manufacturing the nozzle, the nozzle having pressure resistance performance capable of enduring high supply pressure of the cleaning liquid.