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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 11721556 B1

PDFFull Text
Date of Patent:
Aug. 08, 2023

Filed:

Jul. 22, 2020

Article manufacturing method, film forming method, mold manufacturing method, exposure apparatus, information processing method, and non-transitory computer-readable medium storing a program

Applicant:

Canon Kabushiki Kaisha, Tokyo, JP;

Inventor:

Hiroshi Kurosawa, Utsunomiya, JP;

Assignee:

CANON KABUSHIKI KAISHA, Tokyo, JP;

Attorney:

Rossi, Kimms & McDowell LLP

Primary Examiner:

Deoram Persaud

Int. Cl.
CPC ...
H01L 21/308 (2006.01); G03F 7/20 (2006.01); G03F 7/00 (2006.01); H01L 21/027 (2006.01); H01L 21/66 (2006.01);
U.S. Cl.
CPC ...
H01L 21/3086 (2013.01); G03F 7/0002 (2013.01); G03F 7/70625 (2013.01); H01L 21/0274 (2013.01); H01L 22/12 (2013.01);
Abstract

An article manufacturing method includes a first formation step of forming a focus compensation film on a substrate, a second formation step of forming a resist layer on the focus compensation film, and a transfer step of transferring a pattern of an original to the resist layer using an exposure apparatus. In the first formation step, the focus compensation film is formed such that the focus compensation film has a top surface shape corresponding to an image surface shape of the exposure apparatus.

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Kurosawa, Hiroshi. (2023). Article manufacturing method, film forming method, mold manufacturing method, exposure apparatus, information processing method, and non-transitory computer-readable medium storing a program (U.S. Patent No. 11721556). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/11721556

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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