The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Aug. 08, 2023

Filed:

Oct. 07, 2021
Applicants:

United States Department of Energy, Washington, DC (US);

Colorado School of Mines, Golden, CO (US);

Inventors:

Emily Lowell Warren, Golden, CO (US);

Jeramy David Zimmerman, Golden, CO (US);

Olivia Dean Schneble, Golden, CO (US);

Assignee:

United States Department of Energy, Washington, DC (US);

Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/00 (2006.01); H01L 21/02 (2006.01);
U.S. Cl.
CPC ...
H01L 21/02653 (2013.01); H01L 21/02381 (2013.01); H01L 21/02392 (2013.01); H01L 21/02543 (2013.01); H01L 21/02546 (2013.01); H01L 21/0243 (2013.01); H01L 21/02164 (2013.01); H01L 21/02208 (2013.01); H01L 21/02211 (2013.01); H01L 21/02282 (2013.01); H01L 21/02433 (2013.01); H01L 21/02634 (2013.01);
Abstract

A method for depositing III-V alloys on substrates and compositions therefrom. A first layer comprises a Group III element. A second layer comprises a silica. A substrate has a surface. The second layer is deposited onto a first layer. The depositing is performed by a sol-gel method. The second layer is exposed to a precursor that comprises a Group V element. At least one of the precursor or the Group V element diffuse through the silica. The first layer is transformed into a solid layer comprising a III-V alloy, wherein at least a portion of the first layer to a liquid. The silica retains the liquified first layer, enabling at least one of the precursor or the Group V element to diffuse into the liquid, resulting in the forming of the III-V alloy.


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