The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 08, 2023
Filed:
Feb. 12, 2020
Applicant:
Inha University Research and Business Foundation, Incheon, KR;
Inventors:
Jin-Kyun Lee, Incheon, KR;
Hyun-Taek Oh, Incheon, KR;
Seok-Heon Jung, Incheon, KR;
Jeong-Seok Mun, Gochang-gun, KR;
Assignee:
SAMSUNG ELECTRONICS CO., LTD., Gyeonggi-Do, KR;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G03F 7/039 (2006.01); G03F 7/32 (2006.01); G03F 7/20 (2006.01); G03F 7/027 (2006.01);
U.S. Cl.
CPC ...
G03F 7/0392 (2013.01); G03F 7/027 (2013.01); G03F 7/2004 (2013.01); G03F 7/325 (2013.01);
Abstract
Provided is a resist compound, a method for forming a pattern using the same, and a method for manufacturing a semiconductor device. According to the present disclosure, the compound may be represented by Formula 1.