The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Aug. 08, 2023

Filed:

Aug. 27, 2019
Applicant:

Korea Advanced Institute of Science and Technology, Daejeon, KR;

Inventors:

Yeon Sik Jung, Daejeon, KR;

Hyeuk Jin Han, Daejeon, KR;

Seunghee Cho, Daejeon, KR;

Gyurac Lee, Daejeon, KR;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01N 27/27 (2006.01); H01L 29/41 (2006.01); G01N 21/65 (2006.01); H01J 37/26 (2006.01);
U.S. Cl.
CPC ...
G01N 27/27 (2013.01); G01N 21/658 (2013.01); H01L 29/413 (2013.01); H01J 37/26 (2013.01);
Abstract

A multimodal sensor of high sensitivity and high selectivity using multifunctional three-dimensional nanostructure having electric and optical sensing ability and a method thereof are provided. The method includes forming multi-layered nanowires including a multifunctional material, transferring the nanowires to a plurality of layers onto a target substrate to form the three-dimensional nanostructure, heat-treating the three-dimensional nanostructure, and forming electrode layers at the three-dimensional nanostructure.


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