The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 08, 2023
Filed:
Feb. 28, 2022
Applicant:
Minebea Mitsumi Inc., Nagano, JP;
Inventors:
Fumihiro Inoue, Tokyo, JP;
Taketomo Nakane, Tokyo, JP;
Assignee:
MINEBEA MITSUMI Inc., Nagano, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01N 27/00 (2006.01); G01N 27/22 (2006.01);
U.S. Cl.
CPC ...
G01N 27/223 (2013.01); G01N 27/226 (2013.01); G01N 27/228 (2013.01);
Abstract
A sensor includes a substrate, a reference electrode provided above the substrate, a lower electrode provided above the reference electrode via an insulating film, and an upper electrode provided above the lower electrode via a physical quantity detecting film. The upper electrode and the lower electrode form a parallel-plate-type detection capacitor, and the lower electrode and the reference electrode form a parallel-plate-type reference capacitor.