The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 08, 2023
Filed:
Jun. 26, 2019
Applied Materials, Inc., Santa Clara, CA (US);
Stefan Bangert, Steinau, DE;
Tommaso Vercesi, Aschaffenburg, DE;
Daniele Gislon, Santa Maria di Sala-Venice, IT;
Oliver Heimel, Wabern, DE;
Andreas Lopp, Freigericht, DE;
Dieter Haas, San Jose, CA (US);
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
A mask arrangement for masking a substrate in a processing chamber is provided. The mask arrangement includes a mask frame having one or more frame elements and is configured to support a mask device, wherein the mask device is connectable to the mask frame; and at least one actuator connectable to at least one frame element of the one or more frame elements, wherein the at least one actuator is configured to apply a force to the at least one frame element.