The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 08, 2023
Filed:
Apr. 01, 2020
Applicant:
Canon Kabushiki Kaisha, Tokyo, JP;
Inventor:
Tadashi Hattori, Utsunomiya, JP;
Assignee:
Canon Kabushiki Kaisha, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B29C 59/02 (2006.01); B29C 59/00 (2006.01); G03F 7/00 (2006.01); B29C 59/16 (2006.01);
U.S. Cl.
CPC ...
B29C 59/02 (2013.01); B29C 59/002 (2013.01); G03F 7/0002 (2013.01); B29C 59/16 (2013.01);
Abstract
An imprint apparatus that forms a curable composition on a substrate using a mold includes a first measurement unit configured to measure a height distribution of the substrate at a contact position where the mold and the curable composition are brought into contact with each other. The first measurement unit measures a height of the substrate by bringing a probe into contact with a surface of the substrate, the probe having a contact surface area smaller than a contact surface area of the mold.