The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Aug. 01, 2023

Filed:

Dec. 11, 2020
Applicant:

Applied Materials, Inc., Santa Clara, CA (US);

Inventors:

Benjamin B. Riordon, Newburyport, MA (US);

James D. Strassner, Austin, TX (US);

Assignee:

APPLIED MATERIALS, INC., Santa Clara, CA (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/683 (2006.01); C23C 16/458 (2006.01); C23C 16/04 (2006.01); H01L 21/687 (2006.01); H01L 21/02 (2006.01); B05C 21/00 (2006.01); C23C 14/04 (2006.01);
U.S. Cl.
CPC ...
H01L 21/6838 (2013.01); B05C 21/005 (2013.01); C23C 14/042 (2013.01); C23C 16/042 (2013.01); C23C 16/4585 (2013.01); H01L 21/02266 (2013.01); H01L 21/68721 (2013.01);
Abstract

Embodiments of the present disclosure are related to carrier assemblies that can clamp more than one optical device substrates and methods for forming the carrier assemblies. The carrier assembly includes a carrier, one or more substrates, and a mask. The carrier is magnetically coupled to the mask to retain the one or more substrates. The carrier assembly is used for supporting and transporting the one or more substrates during processing. The carrier assembly is also used for masking the one or more substrates during PVD processing. Methods for assembling the carrier assembly in a build chamber are described herein.


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