The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 01, 2023
Filed:
Mar. 03, 2021
Kioxia Corporation, Tokyo, JP;
Youyang Ng, Yokohama, JP;
Bo Wang, Yokohama, JP;
Takuji Ohashi, Yokohama, JP;
Osamu Yamane, Ebina, JP;
Takeshi Fujiwara, Yokohama, JP;
Kioxia Corporation, Tokyo, JP;
Abstract
An information processing apparatus has an acquisitor configured to acquire an entire area image obtained by capturing an entire area of a processing surface of a wafer including at least one defect, a training image selector configured to select, as a training image, a partial image including at least one defect from the entire area image, a model constructor configured to construct a calculation model of generating a label image obtained by extracting and binarizing the defect included in the partial image, and a learner configured to update a parameter of the calculation model based on a difference between the label image generated by inputting the training image to the calculation model and a reference label image obtained by extracting and binarizing the defect of the training image.