The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 01, 2023
Filed:
Sep. 08, 2021
Semes Co., Ltd, Cheonan-si, KR;
Jun Ho Kim, Seongnam-si, KR;
Sang Hoon Lee, Suwon-si, KR;
Jong Seok Seo, Cheonan-si, KR;
Ho Jin Jang, Cheonan-si, KR;
Gyeong Won Song, Cheonan-si, KR;
SEMES CO., LTD., Chungcheongnam-Do, KR;
Abstract
The inventive concept provides a bake unit. The bake unit comprising: a housing having an upper cover and a lower frame, the upper cover and the lower cover in combination providing a treatment space for heat treatment of a substrate; a heater provided in the treatment space for heating a substrate placed thereon; a heater cup configured to surround the heater; and a first purge gas supply unit for providing a first purge gas flow to block inflow of outer air through a gap between the lower frame and the heater cup.