The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 01, 2023
Filed:
Feb. 26, 2020
Applicant:
Seiko Epson Corporation, Tokyo, JP;
Inventor:
Teruo Takizawa, Matsumoto, JP;
Assignee:
Seiko Epson Corporation, Tokyo, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01C 19/00 (2013.01); G01C 19/5783 (2012.01); G01P 15/125 (2006.01); G01P 15/18 (2013.01); G01C 19/5719 (2012.01); G01C 21/16 (2006.01);
U.S. Cl.
CPC ...
G01P 15/125 (2013.01); G01C 19/5719 (2013.01); G01P 15/18 (2013.01); G01C 21/16 (2013.01);
Abstract
An inertial sensor includes a substrate, a first inertial sensor element provided on the substrate, a lid bonded to the substrate so as to cover the first inertial sensor element, a first drive signal terminal that is provided outside the lid and is for a drive signal to be applied to the first inertial sensor element, and a first detection signal terminal that is provided outside the lid and is for a detection signal output from the first inertial sensor element, in which, in plan view of the substrate, the first drive signal terminal and the first detection signal terminal are provided with the lid interposed therebetween.