The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jul. 25, 2023

Filed:

Nov. 30, 2017
Applicant:

Microsoft Technology Licensing, Llc, Redmond, WA (US);

Inventor:

Peter Krogstrup Jeppesen, Frederiksberg, DK;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 27/18 (2006.01); C23C 14/28 (2006.01); C30B 11/12 (2006.01); H01L 29/06 (2006.01); H01L 39/22 (2006.01); H01L 39/24 (2006.01); H01L 39/06 (2006.01); C30B 23/06 (2006.01); G06N 10/00 (2022.01); B82Y 10/00 (2011.01);
U.S. Cl.
CPC ...
H01L 27/18 (2013.01); C23C 14/28 (2013.01); C30B 11/12 (2013.01); C30B 23/06 (2013.01); H01L 29/0669 (2013.01); H01L 39/06 (2013.01); H01L 39/22 (2013.01); H01L 39/24 (2013.01); H01L 39/248 (2013.01); H01L 39/249 (2013.01); B82Y 10/00 (2013.01); G06N 10/00 (2019.01);
Abstract

A mixed semiconductor-superconductor platform is fabricated in phases. In a masking phase, a dielectric mask is formed on a substrate, such that the dielectric mask leaves one or more regions of the substrate exposed. In a selective area growth phase, a semiconductor material is selectively grown on the substrate in the one or more exposed regions. In a superconductor growth phase, a layer of superconducting material is formed, at least part of which is in direct contact with the selectively grown semiconductor material. The mixed semiconductor-superconductor platform comprises the selectively grown semiconductor material and the superconducting material in direct contact with the selectively grown semiconductor material.


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