The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 25, 2023
Filed:
Apr. 30, 2021
Applicants:
Pico & Tera Co., Ltd., Suwon, KR;
Bum Je Woo, Seongnam, KR;
Inventors:
Bum Je Woo, Seongnam, KR;
Seok Mun Yoon, Suwon, KR;
Jang Heo, Suwon, KR;
Young Chul Kim, Yongin, KR;
Assignees:
Other;
PICO & TERA CO., LTD., Suwon, KR;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/673 (2006.01); H01L 21/02 (2006.01); H01L 21/67 (2006.01);
U.S. Cl.
CPC ...
H01L 21/67393 (2013.01); H01L 21/02 (2013.01); H01L 21/67 (2013.01); H01L 21/673 (2013.01); H01L 21/6732 (2013.01);
Abstract
The present invention relates to a container for storing a wafer, particularly to a container for storing a wafer in which a plurality of purging areas is vertically partitioned in the interior of a storage chamber, and a purge gas is sprayed into the plurality of purging areas, thereby allowing not only uniform purging of the wafer to be assured but also efficient purging of the wafer without waste of the purge gas to be achieved.