The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 25, 2023
Filed:
May. 27, 2021
Applicant:
Fujitsu Optical Components Limited, Kawasaki, JP;
Inventor:
Nobuaki Mitamura, Saitama, JP;
Assignee:
FUJITSU OPTICAL COMPONENTS LIMITED, Kawasaki, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G02F 1/065 (2006.01); G02F 1/1337 (2006.01); G02B 6/122 (2006.01); G02F 1/035 (2006.01); G02B 6/12 (2006.01);
U.S. Cl.
CPC ...
G02F 1/065 (2013.01); G02B 6/122 (2013.01); G02F 1/035 (2013.01); G02F 1/133711 (2013.01); G02B 2006/12085 (2013.01); G02B 2006/12142 (2013.01); G02F 2202/022 (2013.01);
Abstract
A multilayer film includes a single-crystal silicon layer, a first layer containing Zr, a second layer containing ZrO, and a third layer containing a perovskite oxide having an electrooptic effect. The first layer, the second layer, and the third layer are provided in this order above the single-crystal silicon layer, and the multilayer film is transparent to a wavelength to be used.