The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 25, 2023
Filed:
Apr. 11, 2022
Shenzhen Conjugate Technology Co., Ltd., Shenzhen, CN;
Hengjiang Ren, Shenzhen, CN;
Jie Luo, Shenzhen, CN;
Shenzhen Conjugate Technology Co., Ltd., Shenzhen, CN;
Abstract
An accelerometer structure, a method for preparing the accelerometer structure and an acceleration measurement method are provided. The accelerometer structure includes a substrate having a groove structure, a test mass, a plurality of nano-tethers, and a nano-photonic-crystal measurement unit. The test mass, nano-tethers, and the nano-photonic-crystal measurement unit are suspended above the groove structure. A nano-photonic-crystal resonant cavity is formed in the nano-photonic-crystal measurement unit, and an acceleration of the test mass is characterized by a resonant frequency of the nano-photonic-crystal resonant cavity. The present disclosure provides a photoelasticity-based opto-micromechanical accelerometer structure, which uses a cavity resonance tension sensor in a nano-photonic-crystal cavity to measure a tension of the nano-photonic-crystal resonant cavity. The tension is concentrated in the nano-photonic-crystal resonant cavity, which makes the measurement of the tension more accurate and the resolution higher. Photoelastic-optomechanical coupling is also increased due to the nano-photonic-crystal resonant cavity.