The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 25, 2023
Filed:
Nov. 04, 2020
Horiba Stec, Co., Ltd., Kyoto, JP;
Edward Cocciadiferro, Reno, NV (US);
Patrick Lowery, Reno, NV (US);
HORIBA STEC, Co., Ltd., Kyoto, JP;
Abstract
A mass flow controller, including a block body having a flow path and a valve provided at least in part within the flow path. The mass flow controller may further include a valve position sensor, a first temperature sensor, a first pressure sensor located on an upstream side of the flow path from the valve, and a second pressure sensor located on a downstream side of the flow path from the valve. The mass flow controller may further include a processor configured to receive valve position data, first temperature data, first pressure data, and second pressure data. The processor may be further configured to estimate a flow rate of fluid in the flow path at least in part by applying a trained machine learning model to the valve position data, the first temperature data, the first pressure data, and the second pressure data.