The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jul. 18, 2023

Filed:

Jan. 31, 2020
Applicant:

Murata Manufacturing Co., Ltd., Nagaokakyo, JP;

Inventors:

Shinsuke Ikeuchi, Nagaokakyo, JP;

Tetsuya Kimura, Nagaokakyo, JP;

Katsumi Fujimoto, Nagaokakyo, JP;

Yutaka Kishimoto, Nagaokakyo, JP;

Fumiya Kurokawa, Nagaokakyo, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 41/09 (2006.01); H10N 30/20 (2023.01); H10N 30/045 (2023.01); H10N 30/50 (2023.01); H10N 30/87 (2023.01); H10N 30/88 (2023.01); H10N 30/00 (2023.01);
U.S. Cl.
CPC ...
H10N 30/20 (2023.02); H10N 30/045 (2023.02); H10N 30/1051 (2023.02); H10N 30/50 (2023.02); H10N 30/871 (2023.02); H10N 30/883 (2023.02);
Abstract

A piezoelectric device includes a piezoelectric single crystal body with a homogeneous polarization state and of which at least a portion flexurally vibrates, an upper electrode on an upper surface of the piezoelectric single crystal body, a lower electrode on a lower surface of the piezoelectric single crystal body, and a supporting substrate below the piezoelectric single crystal body. A recess extends from a lower surface of the supporting substrate toward the lower surface of the piezoelectric single crystal body.


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