The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jul. 18, 2023

Filed:

May. 22, 2020
Applicant:

Slt Technologies, Inc, Los Angeles, CA (US);

Inventors:

Wenkan Jiang, Walnut, CA (US);

Mark P. D'Evelyn, Vancouver, WA (US);

Derrick S. Kamber, Camas, WA (US);

Dirk Ehrentraut, Camas, WA (US);

Jonathan D. Cook, Santa Barbara, CA (US);

James Wenger, Vancouver, WA (US);

Assignee:

SLT TECHNOLOGIES, INC., Los Angeles, CA (US);

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
C30B 7/10 (2006.01); C30B 7/00 (2006.01); C30B 29/40 (2006.01); H01L 29/20 (2006.01); H01L 21/02 (2006.01); C30B 33/10 (2006.01); H01L 29/778 (2006.01); H01L 33/32 (2010.01);
U.S. Cl.
CPC ...
H01L 21/02005 (2013.01); C30B 7/005 (2013.01); C30B 7/105 (2013.01); C30B 29/406 (2013.01); C30B 33/10 (2013.01); H01L 21/0254 (2013.01); H01L 21/02642 (2013.01); H01L 21/02647 (2013.01); H01L 29/2003 (2013.01); H01L 29/7788 (2013.01); H01L 33/32 (2013.01);
Abstract

Embodiments of the present disclosure include techniques related to techniques for processing materials for manufacture of group-III metal nitride and gallium based substrates. More specifically, embodiments of the disclosure include techniques for growing large area substrates using a combination of processing techniques. Merely by way of example, the disclosure can be applied to growing crystals of GaN, AlN, InN, InGaN, AlGaN, and AlInGaN, and others for manufacture of bulk or patterned substrates. Such bulk or patterned substrates can be used for a variety of applications including optoelectronic and electronic devices, lasers, light emitting diodes, solar cells, photo electrochemical water splitting and hydrogen generation, photodetectors, integrated circuits, and transistors, and others.


Find Patent Forward Citations

Loading…